Thick diamond-like carbon film deposited using mid-frequency magnetron sputtering

被引：0
|
作者：
Yu, Xiang [1 ]
Liu, Yang [2 ]
Wang, Chengbiao [1 ]
Yu, Deyang [2 ]
机构：
[1] School of Engineering and Technology, China University of Geosciences, Beijing 100083, China
[2] Beijing Powertech Co. Ltd., Beijing 100072, China
来源：
Run Hua Yu Mi Feng/Lubrication Engineering | 2006年 / 10期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：25 / 28
相关论文
共 50 条
  • [21] Characteristics of titanium-doped diamond-like carbon films deposited by unbalanced magnetron sputtering
    Nie, Chao-Yin
    Xie, Hong-Mei
    Yang, Juan
    Chen, Zhi-Qian
    Cailiao Rechuli Xuebao/Transactions of Materials and Heat Treatment, 2008, 29 (03): : 147 - 151
  • [22] Experiment of diamond-like carbon film deposited by pulsed laser and cell compatibility of diamond-like carbon film
    Luo, Le
    Xia, Tianrong
    Fang, Xiaodong
    Yan, Zhongya
    Cheng, Guangcun
    Zhongguo Jiguang/Chinese Journal of Lasers, 2009, 36 (10): : 2625 - 2628
  • [23] Microstructures and visible-infrared optical properties of diamond-like carbon films deposited by magnetron sputtering
    Tan, Xin
    Li, Jiachang
    Meng, Keke
    Zhai, Hang
    DIAMOND AND RELATED MATERIALS, 2023, 133
  • [24] Influence of Ne sputtering gas on structure and properties of diamond-like carbon films deposited by pulsed-magnetron sputtering
    Dai, Wei
    Gao, Xiang
    Wang, Qimin
    Xu, Aijiao
    THIN SOLID FILMS, 2017, 625 : 163 - 167
  • [25] Optical, structural and bonding properties of diamond-like amorphous carbon films deposited by DC magnetron sputtering
    Cokun, Ozlem Duyar
    Zerrin, Taner
    DIAMOND AND RELATED MATERIALS, 2015, 56 : 29 - 35
  • [26] Tribological analysis of nano-composite diamond-like carbon films deposited by unbalanced magnetron sputtering
    Chang, YY
    Wang, DY
    Chang, CH
    Wu, WT
    SURFACE & COATINGS TECHNOLOGY, 2004, 184 (2-3): : 349 - 355
  • [27] Surface properties of copper-incorporated diamond-like carbon films deposited by hybrid magnetron sputtering
    Tsai, Meng-Yuan
    Huang, Mao-Suan
    Chen, Li-Kai
    Shen, Yun-Dun
    Lin, Ming-Hong
    Chiang, Yi-Chen
    Ou, Keng-Liang
    Ou, Shih-Fu
    CERAMICS INTERNATIONAL, 2013, 39 (07) : 8335 - 8340
  • [28] Diamond-like carbon coatings deposited by deep oscillation magnetron sputtering in Ar-Ne discharges
    Ferreira, Fabio
    Serra, Ricardo
    Cavaleiro, Albano
    Oliveira, Joao
    DIAMOND AND RELATED MATERIALS, 2019, 98
  • [29] Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering
    Tan, Xin
    Zhai, Hang
    Meng, Keke
    Zhang, Zhongyi
    MATERIALS RESEARCH EXPRESS, 2021, 8 (09)
  • [30] Tribological and Electrical Properties of Chromium Doped Diamond-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering
    Lee, Jaehyeong
    Kim, Nam-Hoon
    Hwang, Soohyun
    Hwang, Sung Hwan
    Park, Yong Seob
    SCIENCE OF ADVANCED MATERIALS, 2018, 10 (03) : 429 - 432
12345