Progress on Development of Highly Sensitive Tunnel Magneto-resistive Sensor

被引：0
|
作者：
Oogane, Mikihiko [1 ,2 ]
Nakano, Takafumi [1 ]
Fujiwara, Kosuke [3 ]
机构：
[1] Graduate School of Engineering, Tohoku University, 6-6-5, Aramaki Aza Aoba, Aoba-ku, Sendai,980-8579, Japan
[2] CSIS, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai,980-8577, Japan
[3] Spin Sensing Factory Corp., 468-1, Aramaki Aza Aoba, Aoba-ku, Sendai,980-0845, Japan
来源：
IEEJ Transactions on Fundamentals and Materials | 2024年 / 144卷 / 08期
关键词：
Magnetic materials - Magnetic sensors - Structural optimization;
D O I：
10.1541/ieejfms.144.306
中图分类号：
学科分类号：
摘要：
We have developed a highly sensitive tunnel magneto-resistive (TMR) sensor. A sensitivity has been dramatically improved by development of soft-magnetic materials and optimization of structure of TMR devices. In addition, 1/f noise was also decreased by improvement of integration techniques and reduction in defects of tunneling barrier layer. Because of dramatic improvement of the sensitivity and 1/f noise, we have successfully achieved the magnetic field resolution of 0.4 pT/Hz0.5 at 1 Hz. We have also demonstrated bio-magnetic field measurement at RT using the improved TMR sensors. © 2024 The Institute of Electrical Engineers of Japan.
引用
收藏
页码：306 / 311
相关论文
共 50 条
  • [31] SWITCHING NOISE IN YOKE MAGNETO-RESISTIVE HEADS
    KIRA, T
    IEEE TRANSACTIONS ON MAGNETICS, 1995, 31 (01) : 910 - 916
  • [32] Giant Magneto-Resistive Effect based Sensor on Laser Direct Structured MID Substrates
    Fischer, Eike Christian
    Bengsch, Sebastian
    de Wall, Sascha
    Wurz, Marc Christopher
    2020 IEEE 70TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC 2020), 2020, : 439 - 444
  • [33] Converting an Analog Signal from a Magneto-Resistive Current Sensor Using a PLL Circuit
    Rafael, Magerramov
    PROCEEDINGS OF THE 2019 IEEE CONFERENCE OF RUSSIAN YOUNG RESEARCHERS IN ELECTRICAL AND ELECTRONIC ENGINEERING (EICONRUS), 2019, : 2079 - 2082
  • [34] Control of Tiny Ultrasonic Linear Actuator Using Magneto-resistive Sensor for Camera Module
    Jung, Woo-Suk
    Kang, Chong-Yoon
    Kim, Jeong-Do
    Yoon, Seok-Jin
    ELECTRIC POWER COMPONENTS AND SYSTEMS, 2010, 38 (01) : 22 - 32
  • [35] Heat dissipation material application for magneto-resistive head
    Zhang, XF
    Yan, X
    Xiao, RF
    Geng, JB
    Xhie, J
    HIGH-DENSITY MAGNETIC RECORDING AND INTEGRATED MAGNETO-OPTICS: MATERIALS AND DEVICES, 1998, 517 : 55 - 60
  • [36] AN INEXPENSIVE MAGNETO-RESISTIVE MECHANICAL TRANSDUCER FOR CLASS EXPERIMENTS
    CARPENTER, RHS
    CARTER, T
    SECKER, B
    JOURNAL OF PHYSIOLOGY-LONDON, 1993, 459 : P300 - P300
  • [37] MAGNETO-RESISTIVE HEAD THERMAL ASPERITY DIGITAL COMPENSATION
    GALBRAITH, RL
    KERWIN, GJ
    POSS, JM
    IEEE TRANSACTIONS ON MAGNETICS, 1992, 28 (05) : 2731 - 2732
  • [38] Magneto-resistive IC memory limitations and architecture implications
    Scheuerlein, RE
    SEVENTH BIENNIAL IEEE INTERNATIONAL NONVOLATILE MEMORY TECHNOLOGY CONFERENCE, PROCEEDINGS, 1998, : 47 - 50
  • [39] Electrical reliability of giant magneto-resistive recording sensors
    Tsu, IF
    Chang, C
    Edelman, HS
    MATERIALS RELIABILITY IN MICROELECTRONICS IX, 1999, 563 : 139 - 144
  • [40] 10-35 NANOSECOND MAGNETO-RESISTIVE MEMORIES
    RANMUTHU, KTM
    RANMUTHU, IW
    POHM, AV
    COMSTOCK, CS
    HASSOUN, M
    IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) : 2532 - 2534
12345