Cathode sputtering and the resulting formation of carbon nanometer-size dust

被引：0
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作者：
Dominique, C. [1 ]
Arnas, C. [1 ]
机构：
[1] Laboratoire de Physique des Interactions Ioniques et Moĺculaires, UMR 6633 CNRS-Universit´ Aix-Marseille, Centre de St J´rôme, case 321, F-13397 Marseille, France
来源：
Journal of Applied Physics | 2007年 / 101卷 / 12期
关键词：
Nanometer-size particles are produced in parallel electrode glow discharges. Supersaturated carbon vapor produced by the sputtering of a graphite cathode is at the origin of their formation. In this context; the energy distribution and the flux of the sputtering particles are estimated. The energy distribution of the emitted carbon atoms is also evaluated as a function of the distance to the cathode; taking into account the collisions with the discharge gas atoms. These collisions induce the carbon vapor cooling and then; a nucleation-condensation phase giving rise to dust precursor clusters. A linear scaling law of growth is established experimentally as a function of time when the dust size is higher than 20 nm. Within the considered time range; this scaling law shows that the growth comes from neutral deposition on the dust surface. © 2007 American Institute of Physics;
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