In-plane rotary comb-drive actuator for a variable optical attenuator

被引：21
|
作者：
Hou, Max Ti-Kuang [1 ]
Huang, Jing-Yi [2 ]
Jiang, Shiue-Shr [2 ]
Yeh, J. Andrew [2 ]
机构：
[1] National United University, Department of Mechanical Engineering, 1, Lienda, Miaoli 36003, Taiwan
[2] National Tsing Hua University, Institute of Nanoengineering and Microsystems, 101, Kuang-Fu Road, Hsinchu 30013, Taiwan
来源：
Journal of Micro/Nanolithography, MEMS, and MOEMS | 2008年 / 7卷 / 04期
关键词：
D O I：
10.1117/1.3013547
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Surface micromachined mirror based on pre-stress comb-drive actuator
    Wang, Weimin
    Yan, Shengmei
    Wang, Qiang
    Qiu, Chuankai
    Chen, Zexiang
    Fan, Bin
    Key Engineering Materials, 2015, 645 : 1115 - 1119
  • [42] Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors
    Shan, Yameng
    Qian, Lei
    Wang, Junduo
    Wang, Kewei
    Zhou, Peng
    Li, Wenchao
    Shen, Wenjiang
    MICROMACHINES, 2024, 15 (02)
  • [43] SIO2 ELECTRET INDUCED BY POTASSIUM IONS ON A COMB-DRIVE ACTUATOR
    Sugiyama, Tatsuhiko
    Aoyama, Mitsuru
    Shibata, Yasushi
    Suzuki, Masato
    Konno, Takashi
    Ataka, Manabu
    Fujita, Hiroyuki
    Hashiguchi, Gen
    2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
  • [44] Development of novel cascade structure for improving stroke of electrostatic comb-drive actuator
    Chiou, J. C.
    Kuo, C. F.
    Lin, Y. J.
    Chang, C. W.
    Hou, K. C.
    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 471 - 474
  • [45] An in-plane, variable optical attenuator using a fluid-based tunable reflective interface
    Lapsley, Michael Ian
    Lin, Sz-Chin Steven
    Mao, Xiaole
    Huang, Tony Jun
    APPLIED PHYSICS LETTERS, 2009, 95 (08)
  • [46] Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators
    Mirzazadeh, Ramin
    Mariani, Stefano
    MICROMACHINES, 2019, 10 (04)
  • [47] Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer
    Iwase, Eiji
    Onoe, Hiroaki
    Matsumoto, Kiyoshi
    Shimoyama, Isao
    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 116 - 119
  • [48] Development of vertical electrostatic comb-drive actuator using magnified cascade configuration
    Chiou, Jin-Chern
    Kuo, Chin-Fu
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (10A): : 6546 - 6549
  • [49] Vertical comb-drive MEMS mirror for optical spectrum sensing
    Inoue, Daisuke
    Oohira, Fumikazu
    Yamamoto, Kazuya
    Kondo, Masahiro
    Harada, Takaki
    Ishimaru, Ichirou
    Hashiguchi, Gen
    Hosogi, Maho
    2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2007, : 79 - 80
  • [50] Optical reflective filter with comb-drive nickel micromirror for optical fiber communication
    Akimoto, K
    Uenishi, Y
    Honma, K
    Nagaoka, S
    47TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, 1997 PROCEEDINGS, 1997, : 614 - 619
12345