In-plane rotary comb-drive actuator for a variable optical attenuator

被引：21
|
作者：
Hou, Max Ti-Kuang [1 ]
Huang, Jing-Yi [2 ]
Jiang, Shiue-Shr [2 ]
Yeh, J. Andrew [2 ]
机构：
[1] National United University, Department of Mechanical Engineering, 1, Lienda, Miaoli 36003, Taiwan
[2] National Tsing Hua University, Institute of Nanoengineering and Microsystems, 101, Kuang-Fu Road, Hsinchu 30013, Taiwan
来源：
Journal of Micro/Nanolithography, MEMS, and MOEMS | 2008年 / 7卷 / 04期
关键词：
D O I：
10.1117/1.3013547
中图分类号：
学科分类号：
摘要：
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