Hollow cathode effect modified time-dependent global model and high-power impulse magnetron sputtering discharge and transport in cylindrical cathode

被引：0
|
作者：
Cui, Suihan [1 ]
Wu, Zhongzhen [1 ,2 ]
Lin, Hai [1 ]
Xiao, Shu [1 ]
Zheng, Bocong [1 ]
Liu, Liangliang [1 ]
An, Xiaokai [1 ]
Fu, Ricky K. Y. [2 ]
Tian, Xiubo [1 ]
Tan, Wenchang [1 ]
Chu, Paul K. [2 ]
机构：
[1] School of Advanced Materials, Peking University, Shenzhen Graduate School, Shenzhen,518055, China
[2] Department of Physics, City University of Hong Kong, Kowloon, Hong Kong
来源：
Journal of Applied Physics | 2019年 / 125卷 / 06期
关键词：
Electric discharges - Simulation platform - Electron sources - Ionization - Magnetron sputtering - Plasma density - Deposition rates - Ions;
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摘要：
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