Multi-probe atomic force microscopy using piezoelectric cantilevers

被引：0
|
作者：
Satoh, Nobuo [1 ,2 ]
Tsunemi, Eika [1 ]
Miyato, Yuji [1 ]
Kobayashi, Kei [2 ,3 ]
Watanabe, Shunji [4 ]
Fujii, Toru [4 ]
Matsushige, Kazumi [1 ,3 ]
Yamada, Hirofumi [1 ,2 ]
机构：
[1] Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan
[2] Leading Project, Kyoto University, Kyoto 615-8510, Japan
[3] International Innovation Center, Kyoto University, Kyoto 615-8520, Japan
[4] Nikon Corporation, Sagamihara, Kanagawa 228-0828, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 8 B期
关键词：
25;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：5543 / 5547
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