Multi-probe atomic force microscopy using piezoelectric cantilevers

被引：0

作者：

Satoh, Nobuo ^{[1
,2
]}

Tsunemi, Eika ^{[1
]}

Miyato, Yuji ^{[1
]}

Kobayashi, Kei ^{[2
,3
]}

Watanabe, Shunji ^{[4
]}

Fujii, Toru ^{[4
]}

Matsushige, Kazumi ^{[1
,3
]}

Yamada, Hirofumi ^{[1
,2
]}

机构：

[1] Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan

[2] Leading Project, Kyoto University, Kyoto 615-8510, Japan

[3] International Innovation Center, Kyoto University, Kyoto 615-8520, Japan

[4] Nikon Corporation, Sagamihara, Kanagawa 228-0828, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 8 B期

关键词：

25;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：5543 / 5547

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