Design and analysis of MEMS vibrating ring gyroscope considering high-g shock reliability

被引:2
|
作者
Yoon, Sung-Jin [1 ]
Park, U.-Sung [1 ]
机构
[1] Dept. of Agency for Defense Development, Korea, Republic of
关键词
Gyroscopes;
D O I
10.5370/KIEE.2015.64.10.1440
中图分类号
学科分类号
摘要
This paper describes a study for anti high-shock design of MEMS vibrating ring gyroscope. Structure models was made by MEMS technology processing. MEMS Vibrating Ring Gyroscope mechanical structure were not only anti-high shock simulated with the LS Dyna Ver 971 software but also with mathematical analysis and the finite element method in order to confirm the shock reliability. Shock test result of a MEMS vibrating gyroscope being developed to have gun-hardened survivability while maintaining tactical grade navigation performance for application to various guided projectiles. © 2015 The Korean Institute of Electrical Engineers.
引用
收藏
页码:1440 / 1447
相关论文
共 50 条
  • [31] A Quadruple Mass Vibrating MEMS Gyroscope With Symmetric Design
    Wu, Guoqiang
    Chua, Geng Li
    Singh, Navab
    Gu, Yuandong
    IEEE SENSORS LETTERS, 2018, 2 (04)
  • [32] Design and fabrication of a high-performance polysilicon vibrating ring gyroscope
    Ayazi, F
    Najafi, K
    MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, : 621 - 626
  • [33] Mechanical Response of MEMS Inductor with Auxiliary Pillar under High-g Shock
    Xu, Lixin
    Li, Yiyuan
    Li, Jianhua
    Lu, Chongying
    MICROMACHINES, 2018, 9 (04)
  • [34] Analysis and design of the sensing element of three-axis high-g MEMS accelerometer
    Zhang Zhenhai
    Li Kejie
    ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS, 2007, : 4891 - 4894
  • [35] High-G Shock Reliability of Ceramic Area-Array Packages
    Lall, Pradeep
    Patel, Kewal
    Lowe, Ryan
    Strickland, Mark
    Geist, Dave
    Montgomery, Randall
    2012 13TH IEEE INTERSOCIETY CONFERENCE ON THERMAL AND THERMOMECHANICAL PHENOMENA IN ELECTRONIC SYSTEMS (ITHERM), 2012, : 1028 - 1036
  • [36] The design and analysis of a robust micro-machined vibrating ring gyroscope
    Chen, Li
    Chen, Deyong
    Wang, Junbo
    2008 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: MEMS/NEMS TECHNOLOGY AND APPLICATIONS, 2009, 7159
  • [37] Simulation and reliability assessment on high-g MEMS accelerometer under thermal stress
    Qin, Li
    Yu, Li-Xia
    Shi, Yun-Bo
    Wang, Meng-Mei
    Feng, Heng-Zhen
    Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology, 2015, 23 (04): : 554 - 559
  • [38] An electromagnetic vibrating ring gyroscope using SOI-MEMS technology
    China Astronaut Research and Training Center, Beijing, China
    不详
    Key Eng Mat, (522-527):
  • [39] High Shock-Resistant Design of Piezoresistive High-g Accelerometer
    Lu Y.
    Qu Z.
    Yang J.
    Wang W.
    Wang W.
    Liu Y.
    Journal of Information Processing Systems, 2023, 19 (02): : 173 - 188
  • [40] Shock Impact Reliability and Failure Analysis of a Three-Axis MEMS Gyroscope
    Li, Jue
    Broas, Mikael
    Makkonen, Joonas
    Mattila, Toni T.
    Hokka, Jussi
    Paulasto-Krockel, Mervi
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2014, 23 (02) : 347 - 355