Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator

被引：0
|
作者：
Corso, Christopher D. [1 ]
Dickherber, Anthony [2 ]
Hunt, William D. [2 ]
机构：
[1] School of Biomedical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States
[2] School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States
来源：
Journal of Applied Physics | 2007年 / 101卷 / 05期
关键词：
Thin films;
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摘要：
Journal article (JA)
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