Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator

被引：0
|
作者：
Corso, Christopher D. [1 ]
Dickherber, Anthony [2 ]
Hunt, William D. [2 ]
机构：
[1] School of Biomedical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States
[2] School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States
来源：
Journal of Applied Physics | 2007年 / 101卷 / 05期
关键词：
Thin films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [21] A 2 GHz oscillator based on a solidly mounted thin film bulk acoustic wave resonator
    Norling, Martin
    Enlund, Johannes
    Gevorgian, Spartak
    Katardjiev, Ilia
    2006 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-5, 2006, : 1813 - +
  • [22] Solidly Mounted Resonator using Shear Horizontal Mode Plate Wave in LiNbO3 Plate
    Kadota, Michio
    Tanaka, Shuji
    2016 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IFCS), 2016, : 329 - 332
  • [23] EFFICIENT EXCITATION OF SHEAR BULK WAVES BY THIN-FILM ZNO ID TRANSDUCERS
    NALAMWAR, AL
    EPSTEIN, M
    WAGERS, RS
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1976, 23 (03): : 190 - 190
  • [24] The High Q Factor Lateral Field-Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
    Chen, Da
    Ren, Wenwen
    Song, Shuren
    Wang, Jingjing
    Liu, Weihui
    Wang, Peng
    MICROMACHINES, 2016, 7 (12):
  • [25] Assessment of the Absolute Mass Attachment to an AlN-Based Solidly Mounted Resonator Using a Single Shear Mode
    Mirea, Teona
    Clement, Marta
    Olivares, Jimena
    Iborra, Enrique
    IEEE ELECTRON DEVICE LETTERS, 2020, 41 (04) : 609 - 612
  • [26] Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators
    Rughoobur, G.
    DeMiguel-Ramos, M.
    Mirea, T.
    Clement, M.
    Olivares, J.
    Diaz-Duran, B.
    Sangrador, J.
    Miele, I.
    Milne, W. I.
    Iborra, E.
    Flewitt, A. J.
    APPLIED PHYSICS LETTERS, 2016, 108 (03)
  • [27] Thickness Shear Vibration of ZnO Thin Film with Dissipation
    Du, Jianke
    Fu, Xian
    Lou, Jia
    Huang, Bin
    Wang, Ji
    2016 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IFCS), 2016, : 96 - 99
  • [28] Solidly mounted resonators operated in thickness shear mode based on c-axis oriented AlN films
    Chen, Da
    Wang, Jingjing
    Li, Dehua
    Xu, Yan
    Li, Zhaoxin
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 165 (02) : 379 - 384
  • [29] A pure shear mode ZnO film resonator for the detection of organophosphorous pesticides
    Chen, Da
    Wang, Jingjing
    Xu, Yan
    Li, Dehua
    SENSORS AND ACTUATORS B-CHEMICAL, 2012, 171 : 1081 - 1086
  • [30] A solidly mounted, high frequency, thickness shear mode bulk acoustic wave resonator using X-LiTaO3 thin plate and SiO2/Ta multilayer acoustic films
    Kadota, Michio
    Ishii, Yoshimi
    Tanaka, Shuji
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2021, 60 (SD)
12345