Scheduling algorithm for cluster tools with residency and reentrant constraints

被引:0
|
作者
Chen, Jia [1 ]
Zhou, Bing-Hai [1 ]
机构
[1] School of Mechanical Engineering, Tongji University, Shanghai 201804s, China
关键词
Compendex;
D O I
暂无
中图分类号
学科分类号
摘要
Scheduling algorithms
引用
收藏
页码:2667 / 2673
相关论文
共 50 条
  • [21] Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints
    Rostami, S
    Hamidzadeh, B
    2001 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS I-IV, PROCEEDINGS, 2001, : 3326 - 3331
  • [22] Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints
    Yang, FaJun
    Wu, NaiQi
    Qiao, Yan
    Zhou, MengChu
    Li, ZhiWu
    IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS, 2017, 47 (03): : 502 - 516
  • [23] Schedulability and scheduling of dual-arm cluster tools with residency time constraints based on Petri net
    Wu, Naiqi
    Zhou, MengChu
    2006 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING, VOLS 1 AND 2, 2006, : 87 - +
  • [24] Modelling and scheduling analysis of multi-cluster tools with residency constraints based on time constraint sets
    Liu, Ming-Xiang
    Zhou, Bing-Hai
    INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, 2013, 51 (16) : 4835 - 4852
  • [25] Scheduling single-armed cluster tools with reentrant wafer flows
    Lee, HY
    Lee, TE
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2006, 19 (02) : 226 - 240
  • [26] A Cyclic Scheduling Approach to Single-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints
    Wang, Jipeng
    Pan, Chunrong
    Hu, Hesuan
    Li, Liang
    Zhou, Yuan
    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2019, 16 (03) : 1373 - 1386
  • [27] Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing
    Zhu, QingHua
    Wu, NaiQi
    Qiao, Yan
    Zhou, MengChu
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2015, 28 (01) : 117 - 125
  • [28] Feedback Control Design for Cluster Tools with Wafer Residency Time Constraints
    Kim, Chulhan
    Lee, Tae-Eog
    PROCEEDINGS 2012 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS (SMC), 2012, : 3063 - 3068
  • [29] A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints
    Wu, Naiqi
    Chu, Chengbin
    Chu, Feng
    Zhou, Meng Chu
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2008, 21 (02) : 224 - 237
  • [30] Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm
    Kim, Hyun-Jung
    Lee, Jun-Ho
    Lee, Tae-Eog
    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2015, 12 (02) : 690 - 700