Guest Editorial Special Section on Sustainability

被引：0
|
作者：
Patterson, Oliver D. [1 ]
Brozek, Tomasz [2 ]
Balamukundhan, Kaushik [3 ]
Fried, David M. [4 ]
Nehrer, Bill [5 ]
Ramarajan, Suresh [6 ]
机构：
[1] Intel Corp, EDS Tech Comm Semicond Mfg, Santa Clara, CA 95054 USA
[2] PDF SOLUT Inc, Santa Clara, CA 95050 USA
[3] Rivos Inc, Santa Clara, CA 95054 USA
[4] Lam Res Corp, Fremont, CA 94538 USA
[5] Technol Consultancy, Soquel, CA 95073 USA
[6] Micron Technol Inc, Boise, ID 83716 USA
来源：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2024年 / 37卷 / 04期
关键词：
D O I：
10.1109/TSM.2024.3485049
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：418 / 421
页数：4
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