Guest Editorial Special Section on Sustainability

被引：0
|
作者：
Patterson, Oliver D. [1 ]
Brozek, Tomasz [2 ]
Balamukundhan, Kaushik [3 ]
Fried, David M. [4 ]
Nehrer, Bill [5 ]
Ramarajan, Suresh [6 ]
机构：
[1] Intel Corp, EDS Tech Comm Semicond Mfg, Santa Clara, CA 95054 USA
[2] PDF SOLUT Inc, Santa Clara, CA 95050 USA
[3] Rivos Inc, Santa Clara, CA 95054 USA
[4] Lam Res Corp, Fremont, CA 94538 USA
[5] Technol Consultancy, Soquel, CA 95073 USA
[6] Micron Technol Inc, Boise, ID 83716 USA
来源：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2024年 / 37卷 / 04期
关键词：
D O I：
10.1109/TSM.2024.3485049
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：418 / 421
页数：4
相关论文
共 50 条
  • [11] Special Section Guest Editorial: Coastal Zone Remote Sensing for Environmental Sustainability
    Chen, Shuisen
    Nainarpandian, Chandrasekar
    Al-Quraishi, Ayad M. Fadhil
    JOURNAL OF APPLIED REMOTE SENSING, 2022, 16 (01)
  • [12] Guest Editorial for the special section of QUALITA
    Kobi, Abdessamad
    Cherfi, Zohra
    Simon, Christophe
    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART O-JOURNAL OF RISK AND RELIABILITY, 2014, 228 (03) : 217 - 217
  • [13] Guest Editorial: Special Section on Detection
    Stephen M. Olenick
    Fire Technology, 2010, 46 : 677 - 677
  • [14] Guest Editorial: Special Section on Detection
    Olenick, Stephen M.
    FIRE TECHNOLOGY, 2010, 46 (03) : 677 - 677
  • [15] Guest editorial - Introduction to the special section
    Chiola, G
    Sanders, WH
    IEEE TRANSACTIONS ON SOFTWARE ENGINEERING, 1999, 25 (02) : 145 - 146
  • [16] SPECIAL SECTION PAPER Guest editorial
    Neely, Andy
    Ng, Irene C. L.
    Roy, Rajkumar
    JOURNAL OF SERVICE MANAGEMENT, 2014, 25 (05) : 578 - 579
  • [17] Special Section Guest Editorial: Microendoscopy
    Yoo, Hongki
    Gora, Michalina
    Li, Xingde
    JOURNAL OF OPTICAL MICROSYSTEMS, 2023, 3 (01):
  • [18] Special Section Guest Editorial: Nanoplasmonics
    Soref, Richard
    Cleary, Justin
    Fathpour, Sasan
    JOURNAL OF NANOPHOTONICS, 2015, 9
  • [19] Guest Editorial for Special Section on BIOKDD
    Kahveci, Tamer
    Salem, Saeed
    Koyuturk, Mehmet
    IEEE-ACM TRANSACTIONS ON COMPUTATIONAL BIOLOGY AND BIOINFORMATICS, 2013, 10 (05) : 1199 - 1200
  • [20] Special section guest editorial: Holography
    1600, SPIE (59):
12345