Dynamic behavior of AlN film grow by reactive magnetron sputtering

被引：0
|
作者：
Tong, Hongbo [1 ]
Liu, Qing [1 ]
Ba, Dechun [2 ]
机构：
[1] School of Mechanical Engineering, Liaoning Shihua University, Fushun 113001, China
[2] School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110004, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2009年 / 29卷 / 01期
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页码：31 / 34
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