Microstructures and photo-electric characteristics of phosphorus-doped hydrogenated silicon films

被引：0

作者：

Chen, Yongsheng ^{[1
]}

Wang, Shengzhao ^{[1
]}

Yang, Shi-E ^{[1
]}

Gao, Xiaoyong ^{[1
]}

Lu, Jingxiao ^{[1
]}

机构：

[1] Key Laboratory of Materials Physics, Zhengzhou University, Zhengzhou 450052, China

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2006年 / 26卷 / 01期

关键词：

Silicon;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：8 / 11

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