共 50 条
- [41] Micro-quality Control on Ultra-precision Machining of Sapphire Substrates DIGITAL DESIGN AND MANUFACTURING TECHNOLOGY, PTS 1 AND 2, 2010, 102-104 : 738 - 741
- [42] Nano Positioning Control for Ultra-precision Machining using Inverse Hysteresis Model MULTI-FUNCTIONAL MATERIALS AND STRUCTURES III, PTS 1 AND 2, 2010, 123-125 : 735 - +
- [43] Research on input shaping algorithm for rapid positioning of ultra-precision dual-stage NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES XII, 2015, 9556
- [44] Ultra-precision positioning system using robust sliding mode observer and control PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2013, 37 (01): : 235 - 240
- [45] A novel macro/micro dual driven flexible parallel manipulator for precision positioning PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 3, 2004, : 945 - 950
- [46] Design, modeling, and control of coaxial integrated macro-micro composite actuator with high-precision and long-stroke REVIEW OF SCIENTIFIC INSTRUMENTS, 2025, 96 (01):
- [48] A Rapid PID Control Method for High-speed Macro-micro Composite Positioning Stage 2017 18TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2017, : 426 - 431
- [49] Approach of decreasing effect of temperature on positioning accuracy of ultra-precision micro-feed system 2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 779 - +