Modeling and control of a serial type macro-micro dual drive ultra-precision positioning mechanism

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作者
Xiao, Xianqiang
Zhu, Jiacheng
Li, Xinxin
机构
[1] Hefei University of Technology, Hefei 230009, China
[2] Jilin University, Changchun 130025, China
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页码:140 / 143
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