Modeling and control of a serial type macro-micro dual drive ultra-precision positioning mechanism

被引:0
|
作者
Xiao, Xianqiang
Zhu, Jiacheng
Li, Xinxin
机构
[1] Hefei University of Technology, Hefei 230009, China
[2] Jilin University, Changchun 130025, China
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:140 / 143
相关论文
共 50 条
  • [31] Control Analysis of Point-to-point Positioning Based on Macro-micro Stage
    Fang, Jiwen
    Long, Zhili
    Zhang, Lufan
    Cai, Jiandong
    Nian, Longsheng
    ADVANCES IN MECHATRONICS AND CONTROL ENGINEERING, PTS 1-3, 2013, 278-280 : 1563 - +
  • [32] The dynamic modeling and dynamics response analysis of ultra-precision drive machine
    Chen, Xuedong
    Lei, Jin
    2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2008, : 828 - 833
  • [33] Augmented sliding-mode control of an ultra-precision positioning system
    Lee, W. R.
    Lee, J. H.
    You, K. H.
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2011, 35 (03): : 521 - 524
  • [34] Experimental Research of Loading Effect on a 3-DOF Macro-Micro Precision Positioning System
    Xie, Lingbo
    Qiu, Zhicheng
    Zhang, Xianmin
    INTELLIGENT ROBOTICS AND APPLICATIONS, ICIRA 2017, PT III, 2017, 10464 : 777 - 787
  • [35] Dual Loop Iterative Learning Control for Macro-micro Driving Systems
    Jiang Xiaoming
    Chen Xinglin
    2014 33RD CHINESE CONTROL CONFERENCE (CCC), 2014, : 7841 - 7846
  • [36] Automatic calibration of macro-micro dual-drive micromotion stage based on micro-vision
    College of Mechanical Science and Engineering, Jilin University, Changchun 130022, China
    不详
    不详
    Jilin Daxue Xuebao (Gongxueban), 2008, 6 (1326-1331):
  • [37] A sliding-mode control approach in ultra-precision positioning system
    Choi, Insung
    Choi, Seungok
    Heo, Gunhaeng
    Park, Kiheon
    You, Kwanho
    KNOWLEDGE-BASED INTELLIGENT INFORMATION AND ENGINEERING SYSTEMS: KES 2007 - WIRN 2007, PT II, PROCEEDINGS, 2007, 4693 : 728 - 735
  • [38] MACRO-MICRO DUAL-DRIVE STAGES BASED ON DUAL SWITCHING CONDITION AND LOCAL CLOSED LOOP
    Fang, Jiwen
    Long, Zhili
    Zhang, Lufan
    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2015, VOL 4A, 2016,
  • [39] Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash
    Kang, Shuo
    Zhang, Buyang
    Huang, Xing
    Zhong, Rijin
    Huang, Shengzhao
    MACHINES, 2023, 11 (12)
  • [40] Calibration of non-contact incremental linear encoders using a macro-micro dual-drive high-precision comparator
    Yu, Haoyu
    Liu, Hongzhong
    Li, Xuan
    Ye, Guoyong
    Shi, Yongsheng
    Yin, Lei
    Jiang, Weitao
    Chen, Bangdao
    Liu, Xiaokang
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2015, 26 (09)