Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous reentrancy

被引：0
|
作者：
Zhou, Binghai [1 ]
Wang, Zhu [1 ]
Chen, Jia [1 ]
机构：
[1] School of Mechanical Engineering, Tongji University, Shanghai 201804, China
来源：
Journal of Southeast University (English Edition) | 2013年 / 29卷 / 02期
关键词：
Nonlinear programming;
D O I：
10.3969/j.issn.1003-7985.2013.02.014
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：187 / 193
相关论文
共 50 条
  • [21] Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints
    Zhou Bing-hai
    Li Xin
    JOURNAL OF CENTRAL SOUTH UNIVERSITY, 2012, 19 (01) : 187 - 192
  • [22] Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints
    Bing-hai Zhou
    Xin Li
    Journal of Central South University, 2012, 19 : 187 - 192
  • [23] Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net
    Wu, Naiqi
    Chu, Chengbin
    Chu, Feng
    Zhou, MengChu
    PROCEEDINGS OF 2008 IEEE INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL, VOLS 1 AND 2, 2008, : 84 - +
  • [24] Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints
    Qiao, Yan
    Pan, Chun-Rong
    Wu, Nai-Qi
    Zhou, MengChu
    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2015, 12 (03) : 1125 - 1139
  • [25] Wafer Delay Minimization in Scheduling Single-Arm Cluster Tools with Two-Space Process Modules
    Zou, Chengyu
    Zhang, Siwei
    Zeng, Shan
    Gu, Lei
    Li, Jie
    MATHEMATICS, 2024, 12 (12)
  • [26] Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints
    周炳海
    李鑫
    Journal of Central South University, 2012, 19 (01) : 187 - 192
  • [27] Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting
    Liu, ZiCheng
    Wu, NaiQi
    Yang, FaJun
    ADVANCES IN MECHANICAL ENGINEERING, 2016, 8 (05) : 1 - 13
  • [28] Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints
    Qiao, Yan
    Wu, Naiqi
    Zhou, MengChu
    IEEE TRANSACTIONS ON INDUSTRIAL INFORMATICS, 2014, 10 (01) : 286 - 300
  • [29] A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation
    Pan, ChunRong
    Qiao, Yan
    Wu, NaiQi
    Zhou, MengChu
    IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS, 2015, 45 (05): : 805 - 818
  • [30] Scheduling a Single-Arm Two-Cluster Tool With a Process Module Failure Subject to Wafer Residency Time Constraints
    Zhu, Qinghua
    Yuan, Jun
    Wang, Genghong
    Hou, Yan
    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2025, 22 : 667 - 679
12345