Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous reentrancy

被引：0
|
作者：
Zhou, Binghai [1 ]
Wang, Zhu [1 ]
Chen, Jia [1 ]
机构：
[1] School of Mechanical Engineering, Tongji University, Shanghai 201804, China
来源：
Journal of Southeast University (English Edition) | 2013年 / 29卷 / 02期
关键词：
Nonlinear programming;
D O I：
10.3969/j.issn.1003-7985.2013.02.014
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：187 / 193
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