Low-temperature fabrication technologies of Si solar cell by sputter epitaxy method

被引：0
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作者：
Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo [1 ]
184-8588, Japan
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来源：
Jpn. J. Appl. Phys. | / 8卷
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
08KD01
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学科分类号：
摘要：
Energy conversion efficiency - Temperature - Magnetron sputtering - Silicon solar cells - Fabrication - Fluorine compounds - Silicon
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