Advanced manufacturing process control system for PECVD process utilizing fuzzy logic technique

被引：0
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作者：
Chen, Jen-Cheng
Chang, Ming
Heh, Jia-Sheng
机构：
[1] Department of Electronic Engineering, Chung Yuan Christian University, Chung-Li, Taiwan
[2] Department of Mechanical Engineering, Chung Yuan Christian University, Chung-Li, Taiwan
[3] Department of Information and Computer Engineering, Chung Yuan Christian University, Chung-Li, Taiwan
来源：
Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao | 2006年 / 27卷 / 06期
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页码：633 / 638
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