Advanced manufacturing process control system for PECVD process utilizing fuzzy logic technique

被引：0
|
作者：
Chen, Jen-Cheng
Chang, Ming
Heh, Jia-Sheng
机构：
[1] Department of Electronic Engineering, Chung Yuan Christian University, Chung-Li, Taiwan
[2] Department of Mechanical Engineering, Chung Yuan Christian University, Chung-Li, Taiwan
[3] Department of Information and Computer Engineering, Chung Yuan Christian University, Chung-Li, Taiwan
来源：
Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao | 2006年 / 27卷 / 06期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：633 / 638
相关论文
共 50 条
  • [31] The use of grey-fuzzy logic for the optimization of the manufacturing process
    Lin, JL
    Lin, CL
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2005, 160 (01) : 9 - 14
  • [32] Development of Automatic Process Control system with Simulation in PECVD system
    Kim, Youn-Jin
    Lee, Hong-Chul
    2008 INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS, VOLS 1-4, 2008, : 1261 - 1264
  • [33] Fuzzy logic-based torque control system for milling process optimization
    Haber, Rodolfo E.
    Alique, Jose R.
    IEEE TRANSACTIONS ON SYSTEMS MAN AND CYBERNETICS PART C-APPLICATIONS AND REVIEWS, 2007, 37 (05): : 941 - 950
  • [34] Supervisory fuzzy logic controller used for process loop control in DCS system
    El-Geliel, MA
    El-Khazendar, MA
    CCA 2003: PROCEEDINGS OF 2003 IEEE CONFERENCE ON CONTROL APPLICATIONS, VOLS 1 AND 2, 2003, : 263 - 268
  • [35] Design of a fuzzy logic based gap-control system for the EJD process
    Sen, M.
    Shan, H. S.
    Annals of DAAAM for 2005 & Proceedings of the 16th International DAAAM Symposium: INTELLIGENT MANUFACTURING & AUTOMATION: FOCUS ON YOUNG RESEARCHES AND SCIENTISTS, 2005, : 341 - 342
  • [36] Fuzzy logic control of submerged arc welding process
    Su, Yuxin
    Zheng, Chunhong
    Duan, Baoyan
    Li, Heqi
    Xi'an Dianzi Keji Daxue Xuebao/Journal of Xidian University, 2000, 27 (02): : 202 - 205
  • [37] TRAFFIC CONTROL PROCESS OF EXPRESSWAY BY FUZZY-LOGIC
    SASAKI, T
    AKIYAMA, T
    FUZZY SETS AND SYSTEMS, 1988, 26 (02) : 165 - 178
  • [38] Application of fuzzy logic control for the dough proofing process
    Yousefi-Darani, Abdolrahimahim
    Paquet-Durand, Olivier
    Hitzmann, Bernd
    FOOD AND BIOPRODUCTS PROCESSING, 2019, 115 : 36 - 46
  • [39] Wire bonding process control using fuzzy logic
    Kinnaird, C
    Khotanzad, A
    1997 IEEE INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING CONFERENCE PROCEEDINGS, 1997, : B63 - B66
  • [40] Fuzzy logic: A new tool for chemical process control
    Rouvray, DH
    CHEMISTRY & INDUSTRY, 1997, (02) : 60 - 62
12345