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- [23] High-efficiency micro structuring of VUV window materials by laser-induced plasma-assisted ablation (LIPAA) with a KrF excimer laser PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS III, 2004, 5339 : 557 - 567
- [26] Laser-induced plasma-assisted ablation of fused quartz using the fourth harmonic of a Nd+:YAG laser APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 67 (05): : 545 - 549
- [27] Laser-induced plasma-assisted ablation of fused quartz using the fourth harmonic of a Nd+:YAG laser Applied Physics A, 1998, 67 : 545 - 549
- [28] The role of sacrificial target material in micromachining of glass using laser-induced plasma-assisted ablation (LIPAA) RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2021, 176 (7-8): : 662 - 672