Properties of InGaN films grown by reactive sputtering

被引:0
|
作者
Synchrotron Light Application Center, Saga University, Saga 840-8502, Japan [1 ]
不详 [2 ]
机构
来源
Jpn. J. Appl. Phys. | / 8 PART 1卷
关键词
Compendex;
D O I
081203
中图分类号
学科分类号
摘要
III-V semiconductors
引用
收藏
相关论文
共 50 条
  • [31] Structure and mechanical properties of reactive sputtering CrSiN films
    Zhang, Guangan
    Wang, Liping
    Wang, S. C.
    Yan, Pengxun
    Xue, Qunji
    APPLIED SURFACE SCIENCE, 2009, 255 (08) : 4425 - 4429
  • [32] PROPERTIES OF TITANIUM BORIDE FILMS PREPARED BY REACTIVE SPUTTERING
    BLOM, HO
    LARSSON, T
    BERG, S
    OSTLING, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1693 - 1693
  • [33] REACTIVE SPUTTERING OF THIN-FILMS AND INVESTIGATION OF THEIR PROPERTIES
    REICHELT, K
    VACUUM, 1984, 34 (12) : 1067 - 1067
  • [34] Deposition of VOX films by reactive sputtering and its properties
    Wei, Xiaoying
    Zhang, Kailiang
    Wang, Fang
    Wang, Lanlan
    Zhang, Yang
    Song, Kai
    CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2011 (CSTIC 2011), 2011, 34 (01): : 503 - 508
  • [35] PROPERTIES OF NBN FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING
    HOTOVY, I
    HURAN, J
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1993, 137 (01): : K25 - K28
  • [36] REACTIVE SPUTTERING OF THIN FILMS AND INVESTIGATION OF THEIR PROPERTIES.
    Reichelt, K.
    Vacuum, 1984, 34 (12):
  • [37] Properties of nanocrystalline GaN films deposited by reactive sputtering
    Knox-Davies, EC
    Silva, SRP
    Shannon, JM
    DIAMOND AND RELATED MATERIALS, 2003, 12 (08) : 1417 - 1421
  • [38] Properties of ITO films prepared by reactive magnetron sputtering
    Ronny Kleinhempel
    Gunar Kaune
    Matthias Herrmann
    Hartmut Kupfer
    Walter Hoyer
    Frank Richter
    Microchimica Acta, 2006, 156 : 61 - 67
  • [39] Electrical properties of InGaN thin films grown by RF sputtering at different temperatures, varying nitrogen and argon partial pressure ratios
    Jakkala, Pratheesh
    Kordesch, Martin E.
    MATERIALS RESEARCH EXPRESS, 2016, 3 (10):