Multidimensional Analysis of Cobalt-Doped Copper Oxide Thin Films Based on Magnetron Sputtering with LIBS

被引：0
|
作者：
Dong, Lili [1 ]
Wu, Jiasen [2 ]
Xia, Xiangyu [2 ]
Wu, Chuanqi [2 ]
Xiu, Junshan [2 ]
机构：
[1] School of Chemistry and Chemical Engineering, Shandong University of Technology, Shandong, Zibo,255000, China
[2] School of Physics and Optoelectronic Engineering, Shandong University of Technology, Shandong, Zibo,255000, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2024年 / 51卷 / 13期
关键词：
D O I：
10.3788/CJL231190
中图分类号：
学科分类号：
摘要：
Magnetron sputtering
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