Multidimensional Analysis of Cobalt-Doped Copper Oxide Thin Films Based on Magnetron Sputtering with LIBS

被引:0
|
作者
Dong, Lili [1 ]
Wu, Jiasen [2 ]
Xia, Xiangyu [2 ]
Wu, Chuanqi [2 ]
Xiu, Junshan [2 ]
机构
[1] School of Chemistry and Chemical Engineering, Shandong University of Technology, Shandong, Zibo,255000, China
[2] School of Physics and Optoelectronic Engineering, Shandong University of Technology, Shandong, Zibo,255000, China
来源
Zhongguo Jiguang/Chinese Journal of Lasers | 2024年 / 51卷 / 13期
关键词
D O I
10.3788/CJL231190
中图分类号
学科分类号
摘要
Magnetron sputtering
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