Influence of Arc Current on Structure and Properties of the Super-Hard ta-C Film Deposited by Arc Ion Plating

被引：0
|
作者：
Wang, Minglei [1 ,2 ]
Cheng, Weijie [1 ,2 ]
Lin, Guoqiang [1 ,2 ]
机构：
[1] School of Materials Science and Engineering, Dalian University of Technology, Dalian,116024, China
[2] Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian,116024, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2022年 / 51卷 / 08期
关键词：
Arc current - Arc ion plating - Cemented carbide substrates - Diamond-like carbon film - Hardness and modulus - Large particles - Performance - Structures and properties - ta-C film - Tribological properties;
D O I：
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中图分类号：
学科分类号：
摘要：
33
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收藏
页码：3095 / 3102
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