Influence of Arc Current on Structure and Properties of the Super-Hard ta-C Film Deposited by Arc Ion Plating

被引:0
|
作者
Wang, Minglei [1 ,2 ]
Cheng, Weijie [1 ,2 ]
Lin, Guoqiang [1 ,2 ]
机构
[1] School of Materials Science and Engineering, Dalian University of Technology, Dalian,116024, China
[2] Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian,116024, China
关键词
Arc current - Arc ion plating - Cemented carbide substrates - Diamond-like carbon film - Hardness and modulus - Large particles - Performance - Structures and properties - ta-C film - Tribological properties;
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学科分类号
摘要
33
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页码:3095 / 3102
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