Micropatterning of chemical-vapor-deposited diamond films in electron beam lithography

被引：0
|
作者：
Kiyohara, Shuji [1 ]
Ayano, Kenjiro [1 ]
Abe, Takahisa [1 ]
Mori, Katsumi [1 ]
机构：
[1] Dept. of Electronics and Comp. Sci., Faculty of Science and Engineering, Sci. Univ. of Tokyo in Yumaguchi, 1-1-1 Daigaku-Dori, Onoda, Yamaguchi 756-0884, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 7 B期
关键词：
Micropatterning;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：4532 / 4535
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