Micropatterning of chemical-vapor-deposited diamond films in electron beam lithography

被引：0
|
作者：
Kiyohara, Shuji [1 ]
Ayano, Kenjiro [1 ]
Abe, Takahisa [1 ]
Mori, Katsumi [1 ]
机构：
[1] Dept. of Electronics and Comp. Sci., Faculty of Science and Engineering, Sci. Univ. of Tokyo in Yumaguchi, 1-1-1 Daigaku-Dori, Onoda, Yamaguchi 756-0884, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 7 B期
关键词：
Micropatterning;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：4532 / 4535
相关论文
共 50 条
  • [31] CATHODOLUMINESCENCE AND ANNEALING STUDIES OF CHEMICAL-VAPOR-DEPOSITED DIAMOND
    RUAN, JA
    CHOYKE, WJ
    AMERICAN CERAMIC SOCIETY BULLETIN, 1993, 72 (06): : 139 - 146
  • [32] Field emission measurements with μm resolution on chemical-vapor-deposited polycrystalline diamond films
    J Vac Sci Technol B, 3 (2056):
  • [33] AUGER-ELECTRON SPECTROSCOPIC ANALYSIS OF CHEMICAL-VAPOR-DEPOSITED DIAMOND SUBSTRATE INTERFACES
    CHIA, QS
    YOUNES, CM
    PARTRIDGE, PG
    ALLEN, GC
    MAY, PW
    REGO, CA
    JOURNAL OF MATERIALS SCIENCE, 1994, 29 (24) : 6397 - 6402
  • [34] STABLE SECONDARY-ELECTRON EMISSION OBSERVATIONS FROM CHEMICAL-VAPOR-DEPOSITED DIAMOND
    MEARINI, GT
    KRAINSKY, IL
    DAYTON, JA
    WANG, YX
    ZORMAN, CA
    ANGUS, JC
    HOFFMAN, RW
    APPLIED PHYSICS LETTERS, 1994, 65 (21) : 2702 - 2704
  • [35] Picosecond photoluminescence decay of Si-doped chemical-vapor-deposited diamond films
    Phys Rev B, 23 (16448):
  • [36] ELECTRON-EMISSION FROM CHEMICAL-VAPOR-DEPOSITED DIAMOND AND DIELECTRIC-BREAKDOWN
    SHOVLIN, JD
    KORDESCH, ME
    APPLIED PHYSICS LETTERS, 1994, 65 (07) : 863 - 865
  • [37] Picosecond photoluminescence decay of Si-doped chemical-vapor-deposited diamond films
    Turukhin, AV
    Liu, CH
    Gorokhovsky, AA
    Alfano, RR
    Phillips, W
    PHYSICAL REVIEW B, 1996, 54 (23): : 16448 - 16451
  • [38] STUDY OF DEFECTS IN CHEMICAL-VAPOR-DEPOSITED DIAMOND FILMS BY CROSS-SECTIONAL CATHODOLUMINESCENCE
    CREMADES, A
    DOMINGUEZADAME, F
    PIQUERAS, J
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) : 5726 - 5728
  • [39] 1.681-EV LUMINESCENCE CENTER IN CHEMICAL-VAPOR-DEPOSITED HOMOEPITAXIAL DIAMOND FILMS
    STERNSCHULTE, H
    THONKE, K
    SAUER, R
    MUNZINGER, PC
    MICHLER, P
    PHYSICAL REVIEW B, 1994, 50 (19): : 14554 - 14560
  • [40] CHARACTERISTICS AND ORIGIN OF THE 1.681 EV LUMINESCENCE CENTER IN CHEMICAL-VAPOR-DEPOSITED DIAMOND FILMS
    FENG, T
    SCHWARTZ, BD
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (03) : 1415 - 1425
12345