Design and technique optimization of low-g MEMS inertial switch

被引：0
|
作者：
Xiong, Zhuang [1 ]
Zhang, Feng-Tian [1 ]
Yuan, Ming-Quan [1 ]
机构：
[1] Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang,621999, China
来源：
Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology | 2016年 / 24卷 / 03期
关键词：
D O I：
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学科分类号：
摘要：
Fabrication
引用
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页码：404 / 408
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