Design and technique optimization of low-g MEMS inertial switch

被引：0
|
作者：
Xiong, Zhuang [1 ]
Zhang, Feng-Tian [1 ]
Yuan, Ming-Quan [1 ]
机构：
[1] Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang,621999, China
来源：
Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology | 2016年 / 24卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Fabrication
引用
收藏
页码：404 / 408
相关论文
共 50 条
  • [21] Low-Frequency, Low-G MEMS Piezoelectric Energy Harvester
    Xu, R.
    Kim, S. G.
    15TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2015), 2015, 660
  • [22] Fabrication of a silicon based vertical sensitive low-g inertial micro-switch for linear acceleration sensing
    Fengtian Zhang
    Mingquan Yuan
    Weifeng Jin
    Zhuang Xiong
    Microsystem Technologies, 2017, 23 : 2467 - 2473
  • [23] The Design and analysis of Universal Inertial Switch Based MEMS
    Hao, Yongping
    Bao, Liya
    Gu, Shuangxi
    MECHATRONICS AND APPLIED MECHANICS, PTS 1 AND 2, 2012, 157-158 : 308 - +
  • [24] A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping
    Peng, Yingchun
    Wen, Zhiyu
    Li, Dongling
    Shang, Zhengguo
    SENSORS, 2017, 17 (02)
  • [25] Physical model of a MEMS accelerometer for low-g motion tracking applications
    Ang, WT
    Khoo, SY
    Khosla, PK
    Riviere, CN
    2004 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1- 5, PROCEEDINGS, 2004, : 1345 - 1351
  • [26] An advanced nonlinear model of a low-g MEMS accelerometer for a computer pen
    Zumer, Jurij
    Reynaerts, Dominiek
    Boltezar, Miha
    MEASUREMENT, 2012, 45 (03) : 459 - 468
  • [27] High g MEMS inertial switch capable of direction detection
    Xi, Zhanwen
    Kong, Nan
    Nie, Weirong
    Cao, Yun
    Zheng, Can
    SENSORS AND ACTUATORS A-PHYSICAL, 2019, 296 : 7 - 16
  • [28] Design and Performance Analysis of Lateral Type MEMS Inertial Switch
    Gim, Hakseong
    Jang, Seung-gyo
    JOURNAL OF THE KOREAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES, 2020, 48 (07) : 523 - 528
  • [29] Design and Fabrication of Universal Inertial Switch Based on MEMS Technology
    Liu Shuangjie
    Hao Yongping
    Liu Fengli
    MICRO-NANO TECHNOLOGY XV, 2014, 609-610 : 689 - +
  • [30] The design, simulation and fabrication of a novel horizontal sensitive inertial micro-switch with low g value based on MEMS micromachining technology
    Wang, Yongliang
    Feng, Qiu
    Wang, Yan
    Chen, Wenguo
    Wang, Zhaoyu
    Ding, Guifu
    Zhao, Xiaolin
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2013, 23 (10)
12345