Design and technique optimization of low-g MEMS inertial switch

被引：0
|
作者：
Xiong, Zhuang [1 ]
Zhang, Feng-Tian [1 ]
Yuan, Ming-Quan [1 ]
机构：
[1] Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang,621999, China
来源：
Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology | 2016年 / 24卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Fabrication
引用
收藏
页码：404 / 408
相关论文
共 50 条
  • [1] A low-g omnidirectional MEMS inertial switch with load direction identification
    Du, Liqun
    Yu, Yang
    Yuan, Bowen
    Guo, Bingjiang
    Wang, Chao
    Du, Chengquan
    Liu, Junshan
    MICROELECTRONIC ENGINEERING, 2022, 253
  • [2] A Low-g MEMS Inertial Switch Based on Direct Contact Sensing Method
    Xiong, Zhuang
    Wang, Chao
    Zhang, Fengtian
    Xie, Jin
    Shen, Zhaoyang
    Tang, Bin
    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2019, 9 (08): : 1535 - 1541
  • [3] A Silicon Based Low-g MEMS Inertial Switch for Linear Acceleration Sensing Application
    Xiong, Zhuang
    Zhang, Fengtian
    Pu, Yingdong
    Tang, Bin
    Yang, Jie
    Wang, Chao
    2015 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO), 2015, : 302 - 305
  • [4] A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity
    Du Liqun
    Li Yu
    Zhao Jian
    Wang Weitai
    Zhao Wenjun
    Zhao Wen
    Zhu Heqing
    SENSORS AND ACTUATORS A-PHYSICAL, 2018, 270 : 214 - 222
  • [5] A BI-DIRECTIONAL LOW-G MEMS INERTIAL SWITCH WITH MULTIPLE THRESHOLDS FOR PASSIVE SHOCK SEVERITY QUANTIFICATION
    Algoos, Yousef
    Alahmdi, Raed
    Niyazi, AlHammam
    Xu, Qiu
    Feron, Eric
    Younis, Mohammad I.
    2023 22ND INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS, POWERMEMS 2023, 2023, : 91 - 94
  • [6] A Novel Low-g MEMS Bistable Inertial Switch With Self-Locking and Reverse-Unlocking Functions
    Liu, Min
    Zhu, Yingmin
    Wang, Chao
    Chen, Yu
    Wu, Yongle
    Zhang, Hong
    Du, Yijia
    Wang, Weidong
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020, 29 (06) : 1493 - 1503
  • [7] A low-g MEMS acceleration switch based on direct contact method
    Xiong, Z.
    Tang, B.
    Zhang, F.
    Yuan, M.
    Xie, J.
    Wang, C.
    2018 IEEE SENSORS, 2018, : 306 - 308
  • [8] WAKE-UP IOT WIRELESS SENSING NODE BASED ON A LOW-G THRESHOLD MEMS INERTIAL SWITCH WITH RELIABLE CONTACTS
    Ghosh, Sagnik
    Goh, Duan Jian
    Koh, Yul
    Sharma, Jaibir
    Toh, Wei Da
    Chen, Weiguo
    Zhang, Yao
    Ng, Eldwin
    Lal, Amit
    Lee, Joshua E. -Y.
    2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 491 - 494
  • [9] Development of a low-g micro inertial switch based on planar rectangular helical spring
    Wang, C. (wchao.lzms@gmail.com), 1600, Shanghai Jiaotong University (47):
  • [10] A low-g accelerometer for inertial measurement units
    Kapser, K
    Aikele, M
    Gottinger, R
    Hartmann, B
    Burghardt, R
    Seidel, H
    ADVANCED MICROSYSTEMS FOR AUTOMOTIVE APPLICATIONS 2003, 2003, : 349 - 358
12345