Experiments and structural optimization of micro-electro-mechanical system-based grating moving light modulator

被引：0
|
作者：
Zhang, Jie [1 ]
Huang, Shanglian [1 ]
Zhang, Zhihai [1 ]
Sun, Jiyong [1 ]
Shi, Lingna [1 ]
Zhu, Yong [1 ]
机构：
[1] Key Laboratory of Optoelectronic Technology and Systems, Chongqing University, Chongqing 400030, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 2007年 / 27卷 / 09期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1565 / 1569
相关论文
共 50 条
  • [41] paper Dynamics of periodic solution to a electrostatic Micro-Electro-Mechanical system
    Yuan, Qigang
    Cheng, Zhibo
    Li, Xueping
    COMMUNICATIONS IN NONLINEAR SCIENCE AND NUMERICAL SIMULATION, 2023, 116
  • [42] Quantum control spectroscopy (QCS) with a micro-electro-mechanical system (MEMS)
    Buckup, T.
    Moehring, J.
    Motzkus, M.
    MEMS ADAPTIVE OPTICS III, 2009, 7209
  • [43] Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films
    Y. Yang
    S. Allameh
    J. Lou
    B. Imasogie
    B.L. Boyce
    W.O. Soboyejo
    Metallurgical and Materials Transactions A, 2007, 38 : 2340 - 2348
  • [44] A Novel Approach for Micro-electro-mechanical System(MEMS) Vacuum Packaging
    WANG Cheng-gang
    International Journal of Plant Engineering and Management, 2008, (03) : 148 - 153
  • [45] Modeling and simulation for electrostatically driven micro-electro-mechanical (MEMS) system
    Ha, T
    Kwon, O
    Kim, J
    Oh, J
    Won, T
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S676 - S680
  • [46] Chaos and Nonlinear Feedback Control of the Arch Micro-Electro-Mechanical System
    LUO Shaohua
    LI Shaobo
    TAJADDODIANFAR Farid
    Journal of Systems Science & Complexity, 2018, 31 (06) : 1510 - 1524
  • [47] Pulse breakdown characteristics of microscale gap in micro-electro-mechanical system
    You, Xiaoguang
    Cheng, Yonghong
    Meng, Guodong
    Wu, Kai
    Meng, Yongpeng
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2013, 25 (07): : 1867 - 1872
  • [48] Bending properties of a flexible micro-electro-mechanical system array antenna
    Cong, Lin
    Xu, Lixin
    Han, Qi
    Dong, Tao
    9TH INTERNATIONAL CONFERENCE ON MICROWAVE AND MILLIMETER WAVE TECHNOLOGY (ICMMT 2016) PROCEEDINGS, VOL 2, 2016, : 722 - 724
  • [49] Asymptotic properties of quenching for the quasilinear electrostatic micro-electro-mechanical system
    Zhu, Liping
    He, Shujuan
    MODERN PHYSICS LETTERS B, 2021, 35 (16):
  • [50] Chaos and Nonlinear Feedback Control of the Arch Micro-Electro-Mechanical System
    Luo Shaohua
    Li Shaobo
    Tajaddodianfar, Farid
    JOURNAL OF SYSTEMS SCIENCE & COMPLEXITY, 2018, 31 (06) : 1510 - 1524
12345