Experiments and structural optimization of micro-electro-mechanical system-based grating moving light modulator

被引：0
|
作者：
Zhang, Jie [1 ]
Huang, Shanglian [1 ]
Zhang, Zhihai [1 ]
Sun, Jiyong [1 ]
Shi, Lingna [1 ]
Zhu, Yong [1 ]
机构：
[1] Key Laboratory of Optoelectronic Technology and Systems, Chongqing University, Chongqing 400030, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 2007年 / 27卷 / 09期
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页码：1565 / 1569
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