Physical and mechanical properties of Ti/Al multilayer heat releasing coatings

被引：0

作者：

Musil, Jindřich ^{[1
]}

Stupka, Petr ^{[1
]}

Zuzjaková, Šárka ^{[1
]}

Čerstvý, Radomír ^{[1
]}

机构：

[1] Department of Physics and New Technologies for Information Society (NTIS), European Centre of Excellence, University of West Bohemia, Univerzitní 8, Plzeň,CZ-306 14, Czech Republic

来源：

International Journal of Nanomanufacturing | 2015年 / 11卷 / 1-2期

关键词：

Multilayers - Aluminum coatings - Titanium alloys - Aluminum alloys - Binary alloys;

D O I：

10.1504/IJNM.2015.070525

中图分类号：

学科分类号：

摘要：

The paper reports on physical and mechanical properties of sputtered Ti/Al multilayer coatings with a bilayer thickness Λ ranging from 2 to 172 nm releasing heat during annealing. The temperature Thr at which the heat is released during reaction between Al and Ti atoms is investigated. It was found that: 1) Thr: a) decreases from ∼420 to 390°C for the coatings with Λ decreasing from 172 to 17 nm; b) ranges from ∼480 to ∼600°C for the coatings with Λ ≤ 12 nm; 2) the heat ΔHTi/Al evolved in the reaction increases from 5 to 35 kJ/mol with increasing Λ. Besides, it is shown that: 1) the heat can be released also during one pulse of the rapid thermal annealing up to 600°C with heating rate 100°C/s; 2) the released heat results in a strong interaction of the Ti/Al multilayer coating with Si substrate. The mechanical properties of the as-deposited Ti/Al multilayer coatings are also given. Copyright © 2015 Inderscience Enterprises Ltd.

引用

页码：78 / 93

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