Physical and mechanical properties of Ti/Al multilayer heat releasing coatings

被引：0
|
作者：
Musil, Jindřich [1 ]
Stupka, Petr [1 ]
Zuzjaková, Šárka [1 ]
Čerstvý, Radomír [1 ]
机构：
[1] Department of Physics and New Technologies for Information Society (NTIS), European Centre of Excellence, University of West Bohemia, Univerzitní 8, Plzeň,CZ-306 14, Czech Republic
来源：
International Journal of Nanomanufacturing | 2015年 / 11卷 / 1-2期
关键词：
Multilayers - Aluminum coatings - Titanium alloys - Aluminum alloys - Binary alloys;
D O I：
10.1504/IJNM.2015.070525
中图分类号：
学科分类号：
摘要：
The paper reports on physical and mechanical properties of sputtered Ti/Al multilayer coatings with a bilayer thickness Λ ranging from 2 to 172 nm releasing heat during annealing. The temperature Thr at which the heat is released during reaction between Al and Ti atoms is investigated. It was found that: 1) Thr: a) decreases from ∼420 to 390°C for the coatings with Λ decreasing from 172 to 17 nm; b) ranges from ∼480 to ∼600°C for the coatings with Λ ≤ 12 nm; 2) the heat ΔHTi/Al evolved in the reaction increases from 5 to 35 kJ/mol with increasing Λ. Besides, it is shown that: 1) the heat can be released also during one pulse of the rapid thermal annealing up to 600°C with heating rate 100°C/s; 2) the released heat results in a strong interaction of the Ti/Al multilayer coating with Si substrate. The mechanical properties of the as-deposited Ti/Al multilayer coatings are also given. Copyright © 2015 Inderscience Enterprises Ltd.
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页码：78 / 93
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