Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films

被引：0

作者：

机构：

[1] Vorobiev, A.

[2] Spreitzer, M.

[3] Veber, A.

[4] Suvorov, D.

[5] Gevorgian, S.

来源：

Vorobiev, A. (andrei.vorobiev@chalmers.se) | 1600年 / American Institute of Physics Inc.卷 / 116期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

共 50 条

[41] Tunable Bulk Acoustic Wave Resonators Based on Ba0.25Sr0.75TiO3 Thin Films and a HfO2/SiO2 Bragg Reflector
Berge, John
Gevorgian, Spartak
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2011, 58 (12) : 2768 - 2771
[42] Preparation and characterization of epitaxial-grown Ba0.65Sr0.35TiO3 thin films by the sol-gel process on Pt/MgO substrates
Zhang, TJ
Ni, H
Wang, W
JOURNAL OF MATERIALS SYNTHESIS AND PROCESSING, 2002, 10 (01) : 17 - 21
[43] Preparation of highly textured AlN films using Mo and Ti electrode for integrated AlN-based film bulk acoustic wave resonators
Chou, Cheng-Hsien
Lin, Yung-Chen
Huang, Jin-Hua
Tai, Nyan Hwa
Lin, I-Nan
INTEGRATED FERROELECTRICS, 2006, 80 (01) : 407 - 413
[44] Surface acoustic wave humidity sensor based on polycrystalline AlN thin film coated with sol-gel derived nanocrystalline zinc oxide film
Hong, Hoang-Si
Chung, Gwiy-Sang
SENSORS AND ACTUATORS B-CHEMICAL, 2010, 148 (02) : 347 - 352
[45] Modeling tunable bulk acoustic resonators based on induced piezoelectric effect in BaTiO3 and Ba0.25Sr0.75TiO3 films
Vendik, Irina B.
Turalchuk, Pavel A.
Vendik, Orest G.
Berge, John
JOURNAL OF APPLIED PHYSICS, 2008, 103 (01)
[46] Effect of Ru and LaNiO3 barrier layers on lead zirconate titanate films grown on nickel-based metal foils by sol-gel process
Kim, Dong-Joo
Shen, Dongna
Yoon, Sang H.
Choe, Song-Yul
Kaufman, David Y.
CERAMICS INTERNATIONAL, 2008, 34 (05) : 1261 - 1265
[47] High-order mode bulk acoustic wave resonators based on polarity-inverted SiAlN/AlN multilayered films for high-frequency operation
Sekimoto, Jun
Suzuki, Masashi
Kakio, Shoji
APPLIED PHYSICS LETTERS, 2022, 121 (14)
[48] Self-organized micro-holes on titania based sol-gel films under continuous direct writing with a continuous wave ultraviolet laser
Bakhti, S.
Destouches, N.
Balan, L.
Gamet, E.
Reynaud, S.
APPLIED PHYSICS LETTERS, 2013, 102 (21)
[49] X-ray diffraction measurement of residual stress in sol-gel grown lead zirconate titanate thick films on nickel-based super alloy substrate
Hoshyarmanesh, Hamidreza
Nehzat, Naser
Salehi, Mehdi
Ghodsi, Mojtaba
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2015, 29 (02) : 715 - 721
[50] X-ray diffraction measurement of residual stress in sol-gel grown lead zirconate titanate thick films on nickel-based super alloy substrate
Hamidreza Hoshyarmanesh
Naser Nehzat
Mehdi Salehi
Mojtaba Ghodsi
Journal of Mechanical Science and Technology, 2015, 29 : 715 - 721

← 1 2 3 4 5 →