Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films

被引：0
|
作者：
机构：
[1] Vorobiev, A.
[2] Spreitzer, M.
[3] Veber, A.
[4] Suvorov, D.
[5] Gevorgian, S.
来源：
Vorobiev, A. (andrei.vorobiev@chalmers.se) | 1600年 / American Institute of Physics Inc.卷 / 116期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Highly Tunable Film Bulk Acoustic Wave Resonator Based on Pt/ZnO/Fe65Co35 Thin Films
    Singh, Jitendra
    Kumar, Ajay
    Kumar, Mahesh
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2020, 67 (10) : 2130 - 2134
  • [32] High humidity enhanced surface acoustic wave (SAW) H2S sensors based on sol-gel CuO films
    Li, Dengji
    Zu, Xiaotao
    Ao, Dongyi
    Tang, Qingbo
    Fu, YongQing
    Guo, Yuanjun
    Bilawal, Khan
    Faheem, M. Bilal
    Li, Li
    Li, Sean
    Tang, Yongliang
    SENSORS AND ACTUATORS B-CHEMICAL, 2019, 294 : 55 - 61
  • [33] Tunable solidly mounted thin film bulk acoustic resonators based on BaxSr1-xTiO3 films
    Berge, John
    Vorobiev, Andrei
    Steichen, William
    Gevorgian, Spartak
    IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2007, 17 (09) : 655 - 657
  • [34] Highly sensitive surface acoustic wave (SAW) humidity sensors based on sol-gel SiO2 films: Investigations on the sensing property and mechanism
    Tang, Yongliang
    Li, Zhijie
    Ma, Jinyi
    Wang, Lu
    Yang, Jin
    Du, Bo
    Yu, Qingkai
    Zu, Xiaotao
    SENSORS AND ACTUATORS B-CHEMICAL, 2015, 215 : 283 - 291
  • [35] High-overtone mode bulk acoustic wave resonators based on polarization inverted multilayer SiAlN/ScAlN films
    Fukunaga, Kei
    Suzuki, Masashi
    Kakio, Shoji
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2025, 64 (02)
  • [36] Synthesis and electrical characterization of thin films of PT and PZT made from a diol-based sol-gel route
    Tu, YL
    Calzada, ML
    Phillips, NJ
    Milne, SJ
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1996, 79 (02) : 441 - 448
  • [37] Tunable Film Bulk Acoustic Wave Resonator Based on Magnetostrictive Fe65Co35 Thin Films
    Singh, Jitendra
    Kumar, Ajay
    Das, Surajit
    Kothari, Prateek
    2018 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS (APMC), 2018, : 800 - 802
  • [38] High-performance photodetector based on sol-gel epitaxially grown α/β Ga2O3 thin films
    Yu, Miao
    Lv, Chengde
    Yu, Jiangang
    Shen, Yiming
    Yuan, Lei
    Hu, Jichao
    Zhang, Shengnan
    Cheng, Hongjuan
    Zhang, Yuming
    Jia, Renxu
    MATERIALS TODAY COMMUNICATIONS, 2020, 25
  • [39] High-quality temperature-complementary bulk acoustic wave resonators fabricated with strippable single-crystalline AlN films grown on sapphire
    Luo, Tianyou
    Zhang, Yinuo
    Chen, Zhipeng
    Xu, Kaibin
    Ouyang, Peidong
    Hu, Han
    Li, Chenyang
    Zhu, Yuhan
    Yi, Xinyan
    Li, Guoqiang
    APPLIED PHYSICS LETTERS, 2024, 125 (21)
  • [40] Effects of preferred orientation on the piezoelectric properties of Pt/Pb(Zr0.3Ti0.7)O3/Pt thin films grown by sol-gel process
    Park, J-H.
    Yoon, S. H.
    Shen, D.
    Choe, S-Y.
    Yoon, Y. S.
    Park, M.
    Kim, D-J.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2009, 20 (04) : 366 - 373
12345