Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma

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作者：
Tong, Honghui [1 ,2 ]
Fu, Ricky K. Y. [1 ]
Tang, Deli [1 ,2 ]
Zeng, Xuchu [1 ]
Chu, Paul K. [1 ]
机构：
[1] [1,Tong, Honghui
[2] Fu, Ricky K. Y.
[3] 1,Tang, Deli
[4] Zeng, Xuchu
[5] Chu, Paul K.
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Tong, H. | 1600年 / American Institute of Physics Inc.卷 / 92期
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