High precision on-line measurement of step height based on fiber dual-wavelength interferometry

被引:0
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作者
Ma, Sen [1 ]
Xie, Fang [1 ]
Wang, Yun-Zhi [1 ]
Chen, Liang [1 ]
机构
[1] Department of Physics, School of Science, Beijing Jiaotong University, Beijing , China
关键词
Environmental disturbances - Interferometric signals - Interferometric system - Measurement resolution - On-line measurement - Optical fiber measurement - Step height measurement - Two different wavelengths;
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页码:1749 / 1753
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