High precision on-line measurement of step height based on fiber dual-wavelength interferometry

被引：0
|
作者：
Ma, Sen [1 ]
Xie, Fang [1 ]
Wang, Yun-Zhi [1 ]
Chen, Liang [1 ]
机构：
[1] Department of Physics, School of Science, Beijing Jiaotong University, Beijing , China
来源：
Guangdianzi Jiguang/Journal of Optoelectronics Laser | 2014年 / 25卷 / 09期
关键词：
Environmental disturbances - Interferometric signals - Interferometric system - Measurement resolution - On-line measurement - Optical fiber measurement - Step height measurement - Two different wavelengths;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：1749 / 1753
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