共 50 条
- [43] Thermal stability studies for advanced Hafnium and Zirconium ALD precursors SURFACE & COATINGS TECHNOLOGY, 2007, 201 (22-23): : 9060 - 9065
- [50] Novel electrical characterization for advanced CMOS gate dielectrics Science in China Series F: Information Sciences, 2008, 51 : 774 - 779