Formation of microstructure in SiO2 thin film by a femtosecond laser pulse

被引:0
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作者
Kawamura, Ken-Ichi [1 ,2 ]
Motomitsu, Eiji [1 ]
Hirano, Masahiro [1 ]
Hosono, Hideo [1 ]
机构
[1] Hosono Transparent Electro-Active Materials (TEAM) Project, ERATO, Japan Science and Technology Corporation, Sakato 3-2-1, Takatsu-ku, Kawasaki 213-0012, Japan
[2] Materials and Structures Laboratory, Tokyo Institute of Technology, Midori-ku, Yokohama 226-8503, Japan
关键词
D O I
10.1143/jjap.41.4400
中图分类号
学科分类号
摘要
17
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页码:4400 / 4403
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