Effect of the monomer TEOS flow rate on the formation of silicon dioxide films by nonequilibrium, atmospheric pressure plasma jet

被引：0
|
作者：
Lin, Jiang [1 ]
Zhang, Xi-Wen [1 ,2 ]
Han, Gao-Rong [1 ,2 ]
机构：
[1] Institute of Inorganic and Nonmetallic Materials, Zhejiang University, Hangzhou 310027, China
[2] Silicon State Key Laboratory, Zhejiang University, Hangzhou 310027, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2011年 / 42卷 / SUPPL. 2期
关键词：
17;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：302 / 305
相关论文
共 50 条
  • [31] Effect of Applied Voltage on Localized Deposition of Silicon Dioxide-like Films on Stainless Steel Using Atmospheric Pressure Microplasma Jet
    Jiahao Wang
    Tao Wang
    Xin Wang
    Weizhi Yang
    Ziting Wang
    Meng Li
    Liping Shi
    Plasma Chemistry and Plasma Processing, 2023, 43 : 879 - 899
  • [32] Effect of Applied Voltage on Localized Deposition of Silicon Dioxide-like Films on Stainless Steel Using Atmospheric Pressure Microplasma Jet
    Wang, Jiahao
    Wang, Tao
    Wang, Xin
    Yang, Weizhi
    Wang, Ziting
    Li, Meng
    Shi, Liping
    PLASMA CHEMISTRY AND PLASMA PROCESSING, 2023, 43 (04) : 879 - 899
  • [33] On a non-thermal atmospheric pressure plasma jet used for the deposition of silicon-organic films
    Jan Schäfer
    Florian Sigeneger
    Rüdiger Foest
    Detlef Loffhagen
    Klaus-Dieter Weltmann
    The European Physical Journal D, 2018, 72
  • [34] On a non-thermal atmospheric pressure plasma jet used for the deposition of silicon-organic films
    Schaefer, Jan
    Sigeneger, Florian
    Foest, Ruediger
    Loffhagen, Detlef
    Weltmann, Klaus-Dieter
    EUROPEAN PHYSICAL JOURNAL D, 2018, 72 (05):
  • [35] Effect of poly (vinyl alcohol) (PVA) films treated by atmospheric pressure plasma jet and low-pressure plasma
    Liu Xiulan
    Peng Shujing
    Qiu Yiping
    PROCEEDINGS OF 2009 INTERNATIONAL CONFERENCE ON ADVANCED FIBERS AND POLYMER MATERIALS, VOLS 1 AND 2, 2009, : 781 - 783
  • [36] The Formation of Atmospheric Pressure Air Low Temperature Plasma Jet
    Li, Zhiyi
    Liu, Wenzheng
    PLASMA PHYSICS REPORTS, 2022, 48 (11) : 1180 - 1188
  • [37] Electrical characteristics and formation mechanism of atmospheric pressure plasma jet
    Liu, Lijuan
    Zhang, Yu
    Tian, Weijing
    Meng, Ying
    Ouyang, Jiting
    APPLIED PHYSICS LETTERS, 2014, 104 (24)
  • [38] The Formation of Atmospheric Pressure Air Low Temperature Plasma Jet
    Zh. Li
    W. Liu
    Plasma Physics Reports, 2022, 48 : 1180 - 1188
  • [39] THE EFFECT OF ATMOSPHERIC PRESSURE PLASMA JET ON MACROPHAGE ACTIVATION
    Lee, Eun-Jung
    Kwon, Jae-Sung
    Om, Ji-Yeon
    Kim, Kyoung-Nam
    Kim, Kwang-Mahn
    Yu, Je-Wook
    Choi, Eun Ha
    2015 42ND IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCES (ICOPS), 2015,
  • [40] SILICON DIOXIDE DEPOSITION BY ATMOSPHERIC-PRESSURE AND LOW-TEMPERATURE CVD USING TEOS AND OZONE
    FUJINO, K
    NISHIMOTO, Y
    TOKUMASU, N
    MAEDA, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (09) : 2883 - 2887
12345