Fabrication method for moth-eye structure made of glass using vacuum ultraviolet light vitrification of silicone

Antireflection coating on glass is one of the important issues in optical industry. Moth-eye structure, which shows an anti-reflection effect at wide range of incident angle and wavelength, has been paid attention as a key technology for anti-reflection coating in developing optical devices. However, the conventional fabrication methods have several drawbacks, which is difficult to fabricate onto a curved surfaces and large area at low cost. In this work, we proposed and experimentally demonstrated a new fabrication method using photo-curable silicone rubber and vitrification by vacuum ultraviolet light (VUV) to develop glass-made moth-eye structure using printing method. As a result, the fabricated moth-eye structure made of the silicon rubber showed 94.3% transparency and the VUV modified moth-eye structure showed the better performance over 95.5% transparency, compared with a plain glass surface of 92.0% in the visible light range from 470 nm to 700 nm. © 2016 The Institute of Electrical Engineers of Japan.