Solid-state bonding of silicone elastomer to glass by vacuum oxygen plasma, atmospheric plasma, and vacuum ultraviolet light treatment

被引:9
|
作者
Yamamoto, Takatoki [1 ]
机构
[1] Tokyo Inst Technol, Dept Mech & Control Engn, Meguro Ku, Tokyo 1528550, Japan
基金
日本科学技术振兴机构;
关键词
polydimethylsiloxane; oxygen plasma; atmospheric plasma; vacuum ultraviolet light; bonding; surface tension; MICROFLUIDIC SYSTEMS; PDMS; POLY(DIMETHYLSILOXANE); SURFACE; IRRADIATION; WETTABILITY; FABRICATION;
D O I
10.1002/sia.5170
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We experimentally demonstrated that treating a silicone elastomer by a vacuum oxygen plasma, an atmospheric pressure plasma, and vacuum ultraviolet (VUV) radiation resulted in different surface modifications that gave different contact angles, contact angle aging, and bond strengths. The aim of this study was to assess whether high-throughput surface modification techniques of atmospheric pressure plasma and VUV radiation have the potential to replace conventional oxygen plasma modification. Four silicone elastomers with different hardnesses were used as specimens. The surfaces of all four silicone elastomers were successfully modified from hydrophobic to hydrophilic and they were also bonded to glass surfaces by the three surface modification techniques, although considerable variations were observed in the surface hydrophobicity and the bonding properties. The results clearly reveal that atmospheric pressure plasma and VUV treatment have the potential to replace conventional oxygen plasma treatment. In particular, VUV irradiation produced the most hydrophilic surface that was preserved for a long time. Thus, VUV irradiation is the most promising technique for realizing high-throughput surface modification and bonding of silicone elastomers. Copyright (C) 2012 John Wiley & Sons, Ltd.
引用
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页码:817 / 822
页数:6
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