Exposure method using photoresist mask for high-density optical disk mastering

被引：0

作者：

Shimizu, Akihiko ^{[1
]}

Endo, Hideyasu ^{[1
]}

Watanabe, Hisao ^{[1
]}

Obara, Takashi ^{[1
]}

Miyata, Hiroyuki ^{[1
]}

Mizuta, Osamu ^{[1
]}

Takeuchi, Koji ^{[1
]}

Kudo, Yuzuru ^{[1
]}

Hashiguchi, Tsuyoshi ^{[1
]}

机构：

[1] OD Development Center, Research and Development Group, Ricoh Company, Ltd., 1005 Shimo-Ogino, Atsugi, Kanagawa, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 2 B期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：806 / 807

共 50 条

[1] Exposure method using photoresist mask for high-density optical disk mastering
Shimizu, A
Endo, H
Watanabe, H
Obara, T
Miyata, H
Mizuta, O
Takeuchi, K
Kudo, Y
Hashiguchi, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (2B): : 806 - 807
[2] High-density optical disk mastering using multilayer coating method
Umezawa, T
Sugiyama, I
Fujii, E
Kaseya, H
Yamada, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (3B): : 1709 - 1713
[3] Improvements of resolution and surface roughness using alkaline treatment of photoresist surface in high-density optical disk mastering
Umezawa, T
Sekiya, M
Sugiyama, I
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (4A): : 1618 - 1622
[4] Exposing method of using photo-resist mask for high density optical disk mastering
Shimizu, A
Endo, H
Watanabe, H
Obara, T
Miyata, H
Mizuta, O
Takeuchi, K
Kudo, Y
Hashiguchi, T
JOINT INTERNATIONAL SYMPOSIUM ON OPTICAL MEMORY AND OPTICAL DATA STORAGE 1999, 1999, 3864 : 440 - 442
[5] High-density optical disk pattern mastering using nanoimprint lithography
Choi, Choon-Gi
IEEE NMDC 2006: IEEE NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE 2006, PROCEEDINGS, 2006, : 682 - 683
[6] High-density and high-carrier-to-noise-ratio optical disk mastering
Nakano, Toshiyuki, 1600, (31):
[7] HIGH-DENSITY AND HIGH-CARRIER-TO-NOISE-RATIO OPTICAL DISK MASTERING
NAKANO, T
TAIRA, K
MATSUMARU, M
MURAKAMI, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (2B): : 611 - 614
[8] Practical electron beam recorder for high-density optical and magnetic disk mastering
Kitahara, H
Kojima, Y
Kobayashi, M
Katsumura, M
Wada, Y
Iida, T
Kuriyama, K
Yokogawa, F
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (2B): : 1401 - 1406
[9] Practical electron beam recorder for high-density optical and magnetic disk mastering
Kitahara, Hiroaki
Kojima, Yoshiaki
Kobayashi, Masaki
Katsumura, Masahiro
Wada, Yasumitsu
Iida, Tetsuya
Kuriyama, Kazumi
Yokogawa, Fumihiko
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1600, 45 (2 B): : 1401 - 1406
[10] High-density optical disc mastering using photobleachable dye
Higuchi, T
Okumura, Y
Iida, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (4B): : 2130 - 2136

← 1 2 3 4 5 →