Measurement of Ti atom densities against discharge parameters in Ti-O2 magnetron sputtering

被引：0

作者：

Nakamura, T. ^{[1
]}

Okimura, K. ^{[1
]}

机构：

[1] Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan

来源：

Shinku/Journal of the Vacuum Society of Japan | 2001年 / 44卷 / 03期

关键词：

D O I：

10.3131/jvsj.44.314

中图分类号：

学科分类号：

摘要：

引用

页码：314 / 317

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